Society for Integrated Circuit Technology and Applied Research (SITAR) is a Government of India Organization registered under Societies Registration Act, 1860 with its registered office at New Dehli. SITAR has two units. SITAR, Bangalore established in 2003. The SITAR, Bangalore unit has been renamed as Semiconductor Technology and Applied Research Centre (STARC) and has CMOS ASIC and MEMS fabrication facilities and a Thick film line and IC Assembly facilities. The ASIC Fab has 1� digital CMOS, DLM and MIL qualified process technology for Processing 150 mm wafers. The MEMS Fabrication Facility has a process capability of making 1� feature size, deep trenches beyond 100 Microns depth with straight vertical walls and processing 150 mm wafers. The other unit-Gallium Arsenide Enabling Technology Centre (GAETEC), Hyderabad is established and merged with SITAR in April 2004.